i also have a 94 626 2.0l and the maf do tend to go bad every now n then but usaully i take it out n very carefully spray it with throttle body or brake cleaner. now i have not begin to work on the pathy yet so i am not fimiliar with it but if u look on the maf for the mazda closely u can actually see the carbon build up or dirt(the element is black) after cleaning it is chrome n good as new. however i usually reset the ecu or ecm after. the car runs a lil funny at first as it takes time to relearn its functions
just be careful not to damage it patient is the key here
my mistake i meant to put this as a reply to a previous post where people where replacing their maf
