I'm no expert on emissions and am a little nervous about taking my 90Q in next month for its biannual smog. Here's a good site that explains the reasons for failing HC, CO and NOx emissions.
http://www.smogtips.com/failed-emissions-test.cfm
Common causes of high NO are defective EGR, defective Cat, engine overheating and lean fuel mixture. If you haven't had a leaky or dying injector since the last smog inspection I'd rule out bad cats, you've cleaned the EGR system, and didn't mention an oveheating engine. That leaves lean fuel mixture.
Quote from the article- "Lean fuel mixtures cause high NOx. A lean fuel mixture exists when less fuel then required is delivered to the combustion chambers or when more air then necessary is added to the fuel. In either case the lack of gasoline needed to cool the combustion chambers down is not present. Combustion temperatures increase causing high nitrous oxide emissions. A lean fuel condition may be due to a vacuum leaks and/or defective fuel control components, such as the Air Flow Meter, Engine Coolant Temperature Sensor, and O2 sensors."
I'd clean the MAF and probably change O2 sensors if you've never done it. Do you know anyone local with an OBD-1 Consult cable that can check the O2 sensors?
I drove through Sunnyvale last weekend on our way to the Santa Cruz area. I had my laptop and consult cable with me.